Samsung and ASML expand High-NA EUV collaboration
Samsung plans High-NA EUV for future DRAM and joins the 12-inch photomask effort.
Advanced semiconductorsasml.com
Public companyNL1 field
| Technology | ||
|---|---|---|
| Advanced semiconductorsBuilds EUV and High-NA EUV lithography systems used for leading-edge nodes. | Builds EUV and High-NA EUV lithography systems used for leading-edge nodes. | asml.com |
Samsung plans High-NA EUV for future DRAM and joins the 12-inch photomask effort.
They aim for a 12-inch mask pilot line by 2031.
High NA is used on select layers of Panther Lake in volume production.